Flexible stamps

Inmold offers flexibles stamps that can be used to replicated surface structure into chemical or UV curable, thermoplastic or thermosetting polymers by means of e.g. injection molding, extrusion coating, nanoimprint lithography, hot embossing, casting or similar techniques. Our stamps can be made from a silicon or metal master received from the customer or with micro- and nanostructures designed in collaboration with the customer. For most nano- and microstructures, the manufacturing process will leave the master undamaged. We can produce multiple stamps from a single master with both, positive or negative polarity (in most cases). We have fabricated structures with lateral dimension of down to 50 nm and aspect ratio of unity and more, but larger aspect ratios as well as undercuts can lead to defects of master and/or polymer shim. Our flexible stamps are sold for research purpose only.

We have tested our flexible stamps with several polymers, such as polypropylene, polystyrene, cyclic olefin copolymers. For structures with lateral dimensions of above 100 nm and aspect ratio of < unitiy, an antistiction layer is not necessarily required since the stamp material itself has good antistiction properties. An optional anti-adhesion coating may be applied.

Wafer sizes: 50 mm, 100 mm and 150 mm (2”, 4” and 6”), odd sizes up to 150 x 150 mm
Polarity: Positive and negative
Anti-adhesive coating: Fluorinated monolayer